TY  - JOUR
AU  - Atif Imtiaz
AU  - Yuan-Jen Chang
AU  - Jason Gray
AU  - Dragon Seghete
AU  - Steven George
AU  - Thomas Wallis
AU  - Pavel Kabos
AU  - Charles Rogers
AU  - Victor Bright
C2  - IEEE Journal of Microelectromechanical Systems
DA  - 2009-09-24 00:09:00
DO  - https://doi.org/10.1016/j.sna.2008.11.015
LA  - en
M1  - 154
PB  - IEEE Journal of Microelectromechanical Systems
PY  - 2009
TI  - Micromachined resonators of high Q-factor based on atomic layer deposited alumina
ER  -