TY  - CONF
AU  - Adam Steele
AU  - Brenton Knuffman
AU  - Jabez McClelland
C2  - Proceedings of the International Symposium for Testing and Failure Analysis, Houston, TX, US
DA  - 2014-12-31 00:12:00
LA  - en
PB  - Proceedings of the International Symposium for Testing and Failure Analysis, Houston, TX, US
PY  - 2014
TI  - New Ion Source for High Precision FIB Nanomachining and Circuit Edit
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917117
ER  -