TY  - JOUR
AU  - James Potzick
AU  - Egon Marx
C2  - Applied Optics
DA  - 2012-06-10 00:06:00
LA  - en
M1  - 51
PB  - Applied Optics
PY  - 2012
TI  - Parametric uncertainty in nanoscale optical dimensional measurements
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909217
ER  -