TY  - CONF
AU  - John Gillen
AU  - Scott Wight
AU  - P Chi
AU  - Albert Fahey
AU  - Jennifer Verkouteren
AU  - Eric Windsor
AU  - D. Fenner
C2  - Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX
PY  - 2003
TI  - Bevel Depth Profiling SIMS for Analysis of Layer Structures
ER  -