TY - JOUR AU - M Matranga AU - M Barbara AU - A Maggio AU - G Peres AU - S Serio AU - E Takacs AU - E Silver AU - John Gillaspy AU - H Schnopper AU - M Laming AU - J Beeman AU - E Haller AU - N Madden C2 - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms DA - 2003-01-01 00:01:00 LA - en M1 - 205 PB - Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms PY - 2003 TI - EBIT diagnostics using x-ray spectra of highly ionized Ne ER -