TY  - CONF
AU  - Cedric Powell
AU  - Aleksander Jablonski
C2  - AIP Conference Proceedings 683, Characterization and Metrology for ULSI Technology: 2003, Austin, TX
DA  - 2003-09-01
LA  - en
M1  - 683
PB  - AIP Conference Proceedings 683, Characterization and Metrology for ULSI Technology: 2003, Austin, TX
PY  - 2003
TI  - Measurement of Gate-Oxide Film Thickness by X-ray Photoelectron Spectroscopy
ER  -