TY - CONF AU - Elizabeth Kenyon AU - Michael Cresswell AU - Heather Patrick AU - Thomas Germer C2 - Proceedings of the SPIE, Volume 6922, San Jose, CA DA - 2008-09-01 00:09:00 LA - en M1 - 6922 PB - Proceedings of the SPIE, Volume 6922, San Jose, CA PY - 2008 TI - Modeling the Effect of Finite Size Gratings on Scatterometry Measurements UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842444 ER -