TY  - JOUR
AU  - B Lee
AU  - Z Zhang
AU  - E Early
AU  - D DeWitt
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2021-10-12 15:10:21
LA  - en
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2021
TI  - Modeling the Radiative Properties of Silicon With Thin-Film Coatings and the Experimental Validation
ER  -