TY  - JOUR
AU  - Lee, B
AU  - Zhang, Z
AU  - Early, E
AU  - DeWitt, D
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2021-10-12 15:10:21
LA  - en
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2021
TI  - Modeling the Radiative Properties of Silicon With Thin-Film Coatings and the Experimental Validation
ER  -