TY  - CONF
AU  - Li Sung
AU  - George Mulholland
AU  - Thomas Germer
C2  - Proceedings SPIE, Vol. 3619, entitled Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, Undefined
DA  - 1999-01-01 00:01:00
LA  - en
M1  - 3619
PB  - Proceedings SPIE, Vol. 3619, entitled Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays, Undefined
PY  - 1999
TI  - Polarization of Light Scattered by Particles on Silicon Wafers
ER  -