TY  - JOUR
AU  - E Klein
AU  - A Ramirez
AU  - John Hall
C2  - Review of Scientific Instruments
DA  - 2001-05-01 00:05:00
LA  - en
M1  - 72
PB  - Review of Scientific Instruments
PY  - 2001
TI  - A Common-Path Heterodyne Interferometer for Surface Profiling in Microelectronic Fabrication
ER  -