TY  - JOUR
AU  - John Gillen
AU  - Scott Wight
AU  - David Bright
AU  - T Herne
C2  - Scanning
DA  - 1998-07-01
LA  - en
M1  - 20
PB  - Scanning
PY  - 1998
TI  - Quantitative secondary ion mass spectrometry imaging of self-assembled monolayer films for electron beam dose mapping in the environmental scanning electron microscope
ER  -