TY  - JOUR
AU  - M Edamura
AU  - Eric Benck
C2  - Journal of Vacuum Science and Technology A
DA  - 2003-03-01 00:03:00
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology A
PY  - 2003
TI  - Transition From E to H Mode Discharge in Pulse-Modulated Inductively Coupled Plasmas
ER  -