TY  - JOUR
AU  - Michael Cresswell
AU  - Nadine Guillaume
AU  - Richard Allen
AU  - William Guthrie
AU  - Rathindra Ghoshtagore
AU  - James OwenI II
AU  - Z. Osborne
AU  - N. Sullivan
AU  - Loren Linholm
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1999-05-01 00:05:00
LA  - en
M1  - 12
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1999
TI  - Extraction of Sheet-Resistance from Four-Terminal Sheet Resistors in Monocrystalline Films Having Non-Planar Geometries
ER  -