TY  - JOUR
AU  - Yoon Bae
AU  - Martin Sohn
AU  - Dong-Ryoung Lee
AU  - Sang-Soo Choi
C2  - Optics Express
DA  - 2019-10-02 00:10:00
DO  - https://doi.org/10.1364/OE.27.029938
LA  - en
M1  - 27
PB  - Optics Express
PY  - 2019
TI  - Effect of partial coherence on dimensional measurement sensitivity for DUV scatterfield imaging microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928348
ER  -