TY  - JOUR
AU  - Ke Tang
AU  - Hyun Kim
AU  - Aruna Ramanayaka
AU  - David Simons
AU  - Joshua Pomeroy
C2  - Review of Scientific Instruments
DA  - 2019-08-22 00:08:00
DO  - https://doi.org/10.1063/1.5097937
LA  - en
M1  - 90
PB  - Review of Scientific Instruments
PY  - 2019
TI  - A compact, UHV ion source for enriching 28Si and depositing epitaxial thin films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927699
ER  -