TY  - JOUR
AU  - Shannon Hill
AU  - Charles Tarrio
AU  - Robert Berg
AU  - Thomas Lucatorto
C2  - Journal of Vacuum Science & Technology A
DA  - 2020-12-01 05:12:00
DO  - https://dx.doi.org/10.1116/6.0000437
LA  - en
M1  - 38
PB  - Journal of Vacuum Science & Technology A
PY  - 2020
TI  - EUV-induced carbon growth at contaminant pressures between 10-10 mbar and 10-6 mbar: Experiment and model
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=930508
ER  -