TY  - JOUR
AU  - Francesc Salvat-Pujol
AU  - John Villarrubia
C2  - Ultramicroscopy
DA  - 2019-07-31 00:07:00
DO  - https://doi.org/10.1016/j.ultramic.2019.112819
LA  - en
M1  - 206
PB  - Ultramicroscopy
PY  - 2019
TI  - Conventional vs. model-based measurement of patterned line widths from scanning electron microscopy profiles
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927238
ER  -