TY - JOUR AU - Ke Tang AU - Hyun Kim AU - Aruna Ramanayaka AU - David Simons AU - Joshua Pomeroy C2 - Journal of Physics Communications DA - 2020-03-09 00:03:00 DO - https://doi.org/10.1088/2399-6528/ab7b33 LA - en M1 - 4 PB - Journal of Physics Communications PY - 2020 TI - Targeted enrichment of 28Si thin films for quantum computing UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929209 ER -