TY  - JOUR
AU  - Feng Yi
AU  - William Osborn
AU  - Jordan Betz
AU  - David LaVan
C2  - Journal of Microelectromechanical Systems
DA  - 2015-01-11 00:01:00
LA  - en
PB  - Journal of Microelectromechanical Systems
PY  - 2015
TI  - Interactions of Adhesion Materials and Annealing Environment on Resistance and Stability of MEMS Platinum Heaters and Temperature Sensors
ER  -