TY  - JOUR
AU  - Yong Kim
AU  - Hongliang Shi
AU  - Nicholas Dagalakis
AU  - Satyandra Gupta
C2  - Journal of Micromechanics and Microengineering
DA  - 2016-07-06 00:07:00
LA  - en
PB  - Journal of Micromechanics and Microengineering
PY  - 2016
TI  - Design of a MEMS-based motion stage based on a lever mechanism for generating large displacements and forces
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920668
ER  -