TY  - JOUR
AU  - Hongliang Shi
AU  - Hai-Jun Su
AU  - Nicholas Dagalakis
C2  - Journal of Mechanism and Machine Theory
DA  - 2014-07-09 00:07:00
LA  - en
M1  - 80
PB  - Journal of Mechanism and Machine Theory
PY  - 2014
TI  - A Stiffness Model for Control and Analysis of a MEMS Hexapod Nanopositioner
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915774
ER  -