TY  - CONF
AU  - Detleff Bergmann
AU  - Bernd Bodermann
AU  - Harald Bosse
AU  - Egbert Buhr
AU  - Gaoliang Dai
AU  - Ronald Dixson
AU  - W H?er-Grohne
C2  - SPIE Proceedings: Scanning Microscopies 2015, Monterey, CA, US
DA  - 2015-11-02 00:11:00
DO  - https://doi.org/10.1117/12.2199453
LA  - en
M1  - 9636
PB  - SPIE Proceedings: Scanning Microscopies 2015, Monterey, CA, US
PY  - 2015
TI  - Photomask Linewidth Comparison by PTB and NIST
ER  -