TY  - CONF
AU  - Kenneth Kreider
AU  - D DeWitt
AU  - J Fowler
AU  - J Proctor
AU  - William Kimes
AU  - Dean Ripple
AU  - Benjamin Tsai
C2  - Data Analysis and Modeling for Process Control, Technical Conference | | Data Analysis and Modeling for Process Control | SPIE
DA  - 2004-04-01
LA  - en
M1  - 5378
PB  - Data Analysis and Modeling for Process Control, Technical Conference | | Data Analysis and Modeling for Process Control | SPIE
PY  - 2004
TI  - Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830864
ER  -