TY  - JOUR
AU  - Ginusha Perera
AU  - Gila Stein
AU  - James Liddle
C2  - Journal of Vacuum Science and Technology B
DA  - 2010-09-27 00:09:00
LA  - en
M1  - 28
PB  - Journal of Vacuum Science and Technology B
PY  - 2010
TI  - Spatial Coherence in Electron-Beam Patterning
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906171
ER  -