TY  - CONF
AU  - Lin You
AU  - Jungjoon Ahn
AU  - Joseph Kopanski
C2  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, US
DA  - 2014-03-25 00:03:00
LA  - en
PB  - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, US
PY  - 2014
TI  - DESIGN OF TEST STRUCTURE FOR 3D-STACKED INTEGRATED CIRCUITS (3D-SICS) METROLOGY
ER  -