TY  - JOUR
AU  - Kenneth Kreider
AU  - Dean Ripple
AU  - William Kimes
C2  - Measurement Science & Technology
DA  - 2009-03-03
LA  - en
PB  - Measurement Science & Technology
PY  - 2009
TI  - Thin-Film Resistance Thermometers on Silicon Wafers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832220
ER  -