TY  - JOUR
AU  - Hill, Shannon
AU  - Haich, C
AU  - Dunning, F
AU  - Walters, G
AU  - McClelland, Jabez
AU  - Celotta, Robert
AU  - Craighead, H
AU  - Han, J
AU  - Tannenbaum, D
C2  - Journal of Vacuum Science and Technology B
DA  - 1999-05-01 00:05:00
LA  - en
M1  - 17
PB  - Journal of Vacuum Science and Technology B
PY  - 1999
TI  - Patterning of Octadecylsiloxane Self-assembled Monolayers on Si(100) using Ar(<sup>3</sup>P<sub>0</sub>,2) Atoms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620509
ER  -