TY  - JOUR
AU  - Shannon Hill
AU  - C Haich
AU  - F Dunning
AU  - G Walters
AU  - Jabez McClelland
AU  - Robert Celotta
AU  - H Craighead
AU  - J Han
AU  - D Tannenbaum
C2  - Journal of Vacuum Science and Technology B
DA  - 1999-05-01 00:05:00
LA  - en
M1  - 17
PB  - Journal of Vacuum Science and Technology B
PY  - 1999
TI  - Patterning of Octadecylsiloxane Self-assembled Monolayers on Si(100) using Ar(<sup>3</sup>P<sub>0</sub>,2) Atoms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620509
ER  -