TY  - CONF
AU  - Kreider, K
AU  - DeWitt, D
AU  - Tsai, Benjamin
AU  - Lovas, Francis
AU  - Allen, David
C2  - Intl. Conference: Characterization and Metrology for ULSI Technology , Gaithersburg, MD, USA
DA  - 1998-01-01 00:01:00
LA  - en
PB  - Intl. Conference: Characterization and Metrology for ULSI Technology , Gaithersburg, MD, USA
PY  - 1998
TI  - Calibration Wafer for Temperature Measurement in RTP Tools
ER  -