TY - CONF AU - K Kreider AU - D DeWitt AU - Benjamin Tsai AU - Francis Lovas AU - David Allen C2 - Intl. Conference: Characterization and Metrology for ULSI Technology , Gaithersburg, MD, USA DA - 1998-01-01 00:01:00 LA - en PB - Intl. Conference: Characterization and Metrology for ULSI Technology , Gaithersburg, MD, USA PY - 1998 TI - Calibration Wafer for Temperature Measurement in RTP Tools ER -