TY - CONF AU - William Kimes AU - Kenneth Kreider AU - Dean Ripple AU - Benjamin Tsai C2 - 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, Portland, OR DA - 2004-09-15 LA - en PB - 12th IEEE International Conference on Advanced Thermal Processing of Semiconductors, Portland, OR PY - 2004 TI - In Situ Calibration of Lightpipe Radiometers in Rapid Thermal Processing Between 300 C to 700 C UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=830903 ER -