TY  - JOUR
AU  - E Jablonski
AU  - Vivek Prabhu
AU  - S Sambasivan
AU  - Eric Lin
AU  - Daniel Fischer
AU  - D Goldfarb
AU  - M Angelopoulos
AU  - H Ito
C2  - Journal of Vacuum Science and Technology B
DA  - 2003-12-01 00:12:00
LA  - en
M1  - 21
PB  - Journal of Vacuum Science and Technology B
PY  - 2003
TI  - Near-Edge X-Ray Absorption Fine Structure Measurements of Surface Segregation in 157 nm Photoresist Blends
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852205
ER  -