TY  - JOUR
AU  - J Kim
AU  - J Yeo
AU  - U Paik
AU  - Y Jung
AU  - Jinkyoo Park
AU  - Vincent Hackley
C2  - Journal of the Korean Physical Society
DA  - 2001-12-01 00:12:00
LA  - en
M1  - 39
PB  - Journal of the Korean Physical Society
PY  - 2001
TI  - Modification of Electrokinetic Behavior of CeO<sub>2</sub> Abrasive Particles in Chemical Mechanical Polishing for Shallow Trench Isolation
ER  -