TY  - JOUR
AU  - Huang, H
AU  - Winchester, K
AU  - Suvorova, A
AU  - Liu, Yiping
AU  - Hu, X
AU  - Lawn, Brian
AU  - Dell, J
AU  - Faraone, L
C2  - Thin Solid Films
DA  - 2005-07-25 00:07:00
LA  - en
M1  - A435-436
PB  - Thin Solid Films
PY  - 2005
TI  - Effect of Deposition Conditions on Mechanical Properties of Low-Temperature PECVD Silicon Nitride Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850126
ER  -