TY  - JOUR
AU  - H Huang
AU  - K Winchester
AU  - A Suvorova
AU  - Yiping Liu
AU  - X Hu
AU  - Brian Lawn
AU  - J Dell
AU  - L Faraone
C2  - Thin Solid Films
DA  - 2005-07-25 00:07:00
LA  - en
M1  - A435-436
PB  - Thin Solid Films
PY  - 2005
TI  - Effect of Deposition Conditions on Mechanical Properties of Low-Temperature PECVD Silicon Nitride Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850126
ER  -