TY  - JOUR
AU  - S Yang
AU  - P Mirau
AU  - C Pai
AU  - O Nalamasu
AU  - E Reichmanis
AU  - Eric Lin
AU  - V. Lee
AU  - D Gidley
AU  - J Sun
C2  - Chemistry of Materials
DA  - 2001-09-01 00:09:00
LA  - en
M1  - 13
PB  - Chemistry of Materials
PY  - 2001
TI  - Molecular Templating of Nanoporous Ultralow Dielectric Constant (approximate to 1.5) Organosilicates by Tailoring the Microphase Separation of Triblock Copolymers
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851868
ER  -