TY  - JOUR
AU  - M Sahiner
AU  - D Downey
AU  - S Novak
AU  - Joseph Woicik
AU  - D Arena
C2  - Microelectronics Journal
DA  - 2021-10-12 15:10:22
LA  - en
PB  - Microelectronics Journal
PY  - 2021
TI  - The Local Structural Characterization of the Inactive Clusters in B, BF<sub>2</sub> and BF<sub>3</sub> Implanted Si Wafers Using X-Ray Techniques
ER  -