TY  - CONF
AU  - C Archie
AU  - J Lowney
AU  - Michael Postek
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA
DA  - 1999-06-01 00:06:00
LA  - en
M1  - 3677
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XIII, Bhanwar Singh, Editor, Santa Clara, CA, USA
PY  - 1999
TI  - Modeling and Experimental Aspects of Apparent Beam Width as an Edge Resolution Measure
ER  -