TY  - CONF
AU  - Jason Gorman
AU  - Yong Kim
AU  - Nicholas Dagalakis
C2  - Proceedings of the ASME International Mechanical Engineering Conference and Exhibition | 2006| ASME, Chicago, IL, USA
DA  - 2006-11-10 00:11:00
LA  - en
PB  - Proceedings of the ASME International Mechanical Engineering Conference and Exhibition | 2006| ASME, Chicago, IL, USA
PY  - 2006
TI  - Control of MEMS Nanopositioners With Nano-Scale Resolution
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823602
ER  -