TY  - VIDEO
AU  - J Allgair
AU  - C Archie
AU  - W Banke
AU  - H Bogardus
AU  - A Delaporte
AU  - Michael Postek
AU  - J Schlesinger
AU  - B Singh
AU  - Andras Vladar
AU  - A Yanof
C2  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version) (SEMATECH Technical Transfer Document)
DA  - 2000-01-31 00:01:00
LA  - en
PB  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version) (SEMATECH Technical Transfer Document)
PY  - 2000
TI  - Unified Advanced CD-SEM specification for Sub-0.18um Technology (1999 Version)
ER  -