TY - CONF AU - John Suehle AU - Baozhong Zhu AU - Yuan Chen AU - Joseph Berstein C2 - 2004 IEEE International Reliability Physics Symposium Proceedings, Phoenix, AZ, USA DA - 2004-04-29 00:04:00 LA - en PB - 2004 IEEE International Reliability Physics Symposium Proceedings, Phoenix, AZ, USA PY - 2004 TI - Acceleration Factors and Mechanistic Study of Progressive Breakdown in Small Area Ultra-thin Gate Oxides ER -