TY  - JOUR
AU  - Byron Shulver
AU  - Andrew Bunting
AU  - Alan Gundlach
AU  - Les Haworth
AU  - Alan Ross
AU  - Stewart Smith
AU  - Anthony Snell
AU  - J. Stevenson
AU  - Anthony Walton
AU  - Richard Allen
AU  - Michael Cresswell
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2008-11-03 00:11:00
LA  - en
M1  - 21
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2008
TI  - Extraction of Sheet Resistance and Line Width from All-Copper ECD Test Structures Fabricated from Silicon Preforms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32758
ER  -