TY - JOUR AU - Yanxue Hong AU - Aruna Ramanayaka AU - Ryan Stein AU - Joshua Pomeroy C2 - Journal of Vacuum Science and Technology B DA - 2020-12-28 00:12:00 DO - https://doi.org/10.1116/6.0000549 LA - en M1 - 39 PB - Journal of Vacuum Science and Technology B PY - 2020 TI - Developing Single Layer MOS Quantum Dots for Diagnostic Qubits ER -