TY  - JOUR
AU  - Naftaly Krakover
AU  - Robert Ilic
AU  - Slava Krylov
C2  - Journal of Micromechanics and Microengineering
DA  - 2016-09-29 00:09:00
DO  - https://doi.org/10.1088/0960-1317/26/11/115006
LA  - en
M1  - 26
PB  - Journal of Micromechanics and Microengineering
PY  - 2016
TI  - Displacement Sensing Based on Resonant Frequency Monitoring of Electrostatically Actuated Curved Micro Beams
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920773
ER  -