TY  - JOUR
AU  - Jan Wernecke
AU  - Michael Krumrey
AU  - Armin Hoell
AU  - Regis Kline
AU  - Hung-Kung Liu
AU  - Wen-Li Wu
C2  - Journal of Applied Crystallography
DA  - 2014-12-17 00:12:00
LA  - en
PB  - Journal of Applied Crystallography
PY  - 2014
TI  - Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating
ER  -