TY  - JOUR
AU  - Michael Kriese
AU  - Jim Rodriguez
AU  - Gary Fournier
AU  - Steven Grantham
AU  - Shannon Hill
AU  - John Curry
AU  - Charles Tarrio
AU  - Yuriy Platonov
C2  - Proceedings of SPIE
DA  - 2015-03-16 00:03:00
DO  - https://doi.org/10.1117/12.2085934
LA  - en
M1  - 9422
PB  - Proceedings of SPIE
PY  - 2015
TI  - Development and evaluation of interface-stabilized and reactive-sputtered oxide-capped multilayers for EUV lithography
ER  -