TY  - JOUR
AU  - L. Krayer
AU  - June Lau
AU  - Brian Kirby
C2  - Journal of Applied Physics
DA  - 2014-05-07 00:05:00
LA  - en
M1  - 115
PB  - Journal of Applied Physics
PY  - 2014
TI  - Structural and Magnetic Etch Damage in CoFeB
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915872
ER  -