TY  - CONF
AU  - Chu-Shik Kang
AU  - Ulf Griesmann
AU  - Johannes Soons
C2  - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, Stockholm, SE
DA  - 2012-09-09 00:09:00
LA  - en
PB  - Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, Stockholm, SE
PY  - 2012
TI  - Phase-shifting algorithms for the interferometric measurement of form error, diameter variation and refractive index inhomogeneity of fused silica spheres
ER  -