TY  - JOUR
AU  - Jinho Choi
AU  - Byong Park
AU  - Sang Ahn
AU  - Dal-Hyun Kim
AU  - J Lyou
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - Joseph Fu
AU  - Theodore Vorburger
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2016-08-26 00:08:00
DO  - https://doi.org/10.1117/1.JMM.15.3.034005
LA  - en
M1  - 15
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2016
TI  - Evaluation of Carbon Nanotube Probes in Critical Dimension Atomic Force Microscopes
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920628
ER  -