TY  - JOUR
AU  - S Hill
AU  - C Haich
AU  - F Dunning
AU  - G Walters
AU  - Jabez McClelland
AU  - Robert Celotta
AU  - H Craighead
C2  - Applied Physics Letters
DA  - 1999-04-12 00:04:00
LA  - en
M1  - 74
PB  - Applied Physics Letters
PY  - 1999
TI  - Patterning of Hydrogen-Passivated Si(100) using Ar(<sup>3</sup>P<sub>0,2</sub>) Metastable Atoms
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620510
ER  -