TY  - JOUR
AU  - Siddarth Sundaresan
AU  - M Rao
AU  - Yong-lai Tian
AU  - John Schreifels
AU  - M. Wood
AU  - K Jones
AU  - Albert Davydov
C2  - Journal of Electronic Materials
DA  - 2021-10-12 15:10:23
LA  - en
PB  - Journal of Electronic Materials
PY  - 2021
TI  - Comparison of Solid-State Microwave Annealing With Conventional Furnace Annealing of Ion-Implanted SiC
ER  -