TY  - JOUR
AU  - V. Lee
AU  - Christopher Soles
AU  - D Liu
AU  - Barry Bauer
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - A Grill
C2  - Journal of Applied Physics
DA  - 2004-03-01 00:03:00
LA  - en
M1  - 95
PB  - Journal of Applied Physics
PY  - 2004
TI  - Structural Characterization of Porous Low-K Thin Films Prepared by Different Processing Techniques Using X-Ray Porosimetry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852200
ER  -