TY  - JOUR
AU  - D. Giubertoni
AU  - Giancarlo Pepponi
AU  - Salvatore Gennaro
AU  - Massimo Bersani
AU  - M Sahiner
AU  - Stephen Kelty
AU  - Roisin Doherty
AU  - Majeed Foad
AU  - Max Kah
AU  - Karen Kirkby
AU  - Joseph Woicik
C2  - Journal of Applied Physics
DA  - 2008-11-05 00:11:00
LA  - en
M1  - 104
PB  - Journal of Applied Physics
PY  - 2008
TI  - Correlation of Local Structure and Electrical Activation in Arsenic Ultra Shallow Junctions in Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854133
ER  -